High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps
نویسندگان
چکیده
منابع مشابه
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[*] Prof. J. Huskens, X. Duan, Y. Zhao, Dr. A. Perl, Prof. D. N. Reinhoudt Molecular Nanofabrication Group MESAþ Institute for Nanotechnology University of Twente P. O. Box 217, 7500 AE Enschede (The Netherlands) E-mail: j. [email protected] Y. Zhao, E. Berenschot Transducers Science and Technology Group MESAþ Institute for Nanotechnology University of Twente P. O. Box 217, 7500 AE Enschede (T...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2016
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4961250